JPS621225Y2 - - Google Patents

Info

Publication number
JPS621225Y2
JPS621225Y2 JP1982064963U JP6496382U JPS621225Y2 JP S621225 Y2 JPS621225 Y2 JP S621225Y2 JP 1982064963 U JP1982064963 U JP 1982064963U JP 6496382 U JP6496382 U JP 6496382U JP S621225 Y2 JPS621225 Y2 JP S621225Y2
Authority
JP
Japan
Prior art keywords
processing chamber
opened
film forming
room
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982064963U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58168562U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6496382U priority Critical patent/JPS58168562U/ja
Publication of JPS58168562U publication Critical patent/JPS58168562U/ja
Application granted granted Critical
Publication of JPS621225Y2 publication Critical patent/JPS621225Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP6496382U 1982-05-06 1982-05-06 被膜形成装置 Granted JPS58168562U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6496382U JPS58168562U (ja) 1982-05-06 1982-05-06 被膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6496382U JPS58168562U (ja) 1982-05-06 1982-05-06 被膜形成装置

Publications (2)

Publication Number Publication Date
JPS58168562U JPS58168562U (ja) 1983-11-10
JPS621225Y2 true JPS621225Y2 (en]) 1987-01-13

Family

ID=30074970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6496382U Granted JPS58168562U (ja) 1982-05-06 1982-05-06 被膜形成装置

Country Status (1)

Country Link
JP (1) JPS58168562U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6055547B2 (ja) * 1977-06-24 1985-12-05 鐘淵化学工業株式会社 熱可塑性樹脂成形材料
JPS54153740U (en]) * 1978-04-18 1979-10-25

Also Published As

Publication number Publication date
JPS58168562U (ja) 1983-11-10

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